Conductivity and Corrosion Resistance of TiSiC/MeN Multilayer Films

TiSiC/MeN (where Me represents Zr, Ti, and Cr) multilayer films were deposited onto 316LSS substrates for proton exchange membrane fuel cells via magnetron sputtering. A comparative investigation of the microstructures and corrosion resistances of the films was conducted. The results indicate that the incorporation of the MeN interlayers interrupts the continuous growth of the columnar TiSiC layer. The TiSiC/MeN multilayer coated 316LSS exhibits better resistance to corrosion and higher electrical conductivity compared to the TiSiC monolayer. The film porosity dominates the corrosion resistance while the electrical conductivity depends on both the phase structure and oxygen concentrations of the films. The multilayer structure suppresses ion diffusion in the etchant solution and decreases the film porosity. However, interfacial delamination caused by the interaction of the solution with the substrate produces the failure of the monolayer TiSiC.