Overcoming Nanofabrication Variance in Photonic Crystal Cavities by Transfer Print Integration

Sean P. Bommer,Christopher L. Panuski,Benoit Guilhabert, Zhongyi Xia,Martin D. Dawson,Dirk R. Englund,Michael J. Strain

2024 Conference on Lasers and Electro-Optics (CLEO)（2024）

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Nanofabrication,Photonic Crystal Cavities,Natural Substrate,Silicon Photonics,Cavity Photon,Polydimethylsiloxane,Optical Measurements,Printing Process,Resonance Wavelength

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