Close Range and High Resolution Detection of Vibration by Ultrasonic Wave Using Silicon-On-Nothing PMUTs
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL（2024）
关键词
Piezoelectric micromachined ultrasonic transducer (PMUT),scandium aluminum nitride (ScAlN),silicon-on-nothing (SON),time-of-flight (ToF) ranging,vibration detection,Piezoelectric micromachined ultrasonic transducer (PMUT),scandium aluminum nitride (ScAlN),silicon-on-nothing (SON),time-of-flight (ToF) ranging,vibration detection
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