Investigation of SiNx:H Surface Passivation Impact on InAsP/InGaAs E-Swir Photodiodes

Mert Satilmiş, I. Alp Gezgin, Çağri Tok, Habibe Keleş,Walery Kołkowski,Iwona Pasternak,Fikri Oğuz, Wlodek Strupinski,Ekmel Özbay

IEEE Sensors Journal（2024）

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关键词
Extended SWIR,InAsP/InGaAs,ICPCVD,SiNx:H,Dangling bonds,K- trap centers
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