Cr-induced Structural Phase Transformation in Sputter Deposited Poly-Aln Thin Film from Wurtzite to Rocksalt Structure and Their Effect on the Optical Properties
Materials Research Bulletin（2024）
Key words
Polycrystalline-AlN,Al 1-x Cr x N thin film,Phase transformation,Cr-doping,Residual stress,Subgap defect bands
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