Influence of High-κ Dielectrics Integration on ALD-Based MoS2 Field-Effect Transistor Performance
ACS Applied Nano Materials（2024）
Key words
high-kappa dielectrics,atomic layer deposition,MoS2 field-effect transistors (FETs),chargetransfer doping,current-voltage (I-V) characterization,XPS,STEM-EDX
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