Ga2O3/NiO Junction Barrier Schottky Diodes with Ultra-Low Barrier TiN Contact

Power Schottky barrier diodes (SBDs) face an inherent trade-off between forward conduction loss and reverse blocking capability. This limitation becomes more severe for ultra-wide bandgap (UWBG) SBDs due to the large junction field. A high Schottky barrier is usually required to suppress the reverse leakage current at the price of an increased forward voltage drop (V-F). This work demonstrates a Ga2O3 junction barrier Schottky (JBS) diode that employs the embedded p-type NiO grids to move the peak electric field away from the Schottky junction, thereby allowing for the use of an ultra-low barrier TiN Schottky contact. This JBS diode concurrently realizes a low V-F of 0.91 V (at forward current of 100 A/cm(2)) and a high breakdown voltage over 1 kV, with the V-F being the lowest in all the reported vertical UWBG power diodes. Based on the device characteristics measured up to 200 degrees C, we further analyze the power loss of this JBS diode across a wide range of operational duty cycles and temperatures, which is found to outperform the TiN/Ga2O3 SBDs or NiO/Ga2O3 PN diodes. These findings underscore the potential of low-barrier UWBG JBS diodes for high-frequency, high-temperature power electronics applications.