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Novel Design of SOI-Based MEMS Bell Plates for Resonant Applications

Tong Zhu, Elie Lefeuvre,Etienne Herth,David Bouville,Alexis Brenes

2024 SYMPOSIUM ON DESIGN, TEST, INTEGRATION AND PACKAGING OF MEMS/MOEMS, DTIP 2024(2024)

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关键词
MEMS,vibration mode,quality factor,bell plate,FEM simulations,anchor loss
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