Direct Growth of Bi2SeO5 Thin Films for High-k Dielectrics Via Atomic Layer DepositionHyeonbin Park, Jae Hun Hwang,Seung Hoon Oh,Jin Joo Ryu,Kanghyeok Jeon,Minsoo Kang,Hyun-Jun Chai,Ayoung Ham,Gun Hwan Kim,Kibum Kang,Taeyong EomACS NANO（2024）引用 0|浏览6暂无评分关键词Bi2SeO5,ALD,high-k,dielectric,thin film,2D semiconductorAI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
