Polarity Control in Doped Silicon Junctionless Nanowire Transistor for Sensing Application.

S. Ghosh, A. Echresh, M. B. Khan, D. Bhattacharya,U. Kentsch, Slawomir Prucnal, V. Vardhan, S. Biswas,S. Hellebust,J. Wenger, J. D. Holmes, Artur Erbe,Yordan M. Georgiev

Device Research Conference（2024）

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Key words

Sensor Applications,Polarization Control,Liquid Phase,Solar Cells,Gas Sensors,P-n Junction,Silicon Nanowires,Polarization Properties,Top Gate,Doping Type,Carrier Flow,Electron Beam Lithography,Atomic Layer Deposition,Reactive Ion Etching,Metal Vapor,Rapid Thermal Annealing

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