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Enhanced optical and electrical properties of Nb-doped TiO2 thin films synthesized by Atomic Layer Deposition using the supercycle strategy

Getaneh Diress Gesesse,Olivier Debieu,Aline Jolivet,Cédric Frilay,Sylvain Duprey,Philippe Marie,Xavier Portier,Franck Lemarié,Christophe Labbé, Christian Dufour,Clara Grygiel,Christine Labrugère,Mohamad El-Roz,Julien Cardin

Journal of Alloys and Compounds Communications（2024）

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Key words
TCO,Nb-doped TiO2,ALD,supercycle strategy,optical properties,electrical properties
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