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Bottom-Up Design of a Supercycle Recipe for Atomic Layer Deposition of Tunable Indium Gallium Zinc Oxide Thin Films

Carlos Morales,Paul Plate, Ludwig Marth,Franziska Naumann, Malgorzata Kot,Christoph Janowitz,Peter Kus, Marvin Hartwig Zoellner, Christian Wenger,Karsten Henkel,Jan Ingo Flege

ACS APPLIED ELECTRONIC MATERIALS（2024）

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Key words
IGZO,PEALD,supercycle,XPS depthprofiling,current density
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