Variations of Plasma Potential in RF Discharges with DC-grounded Electrode
PLASMA SOURCES SCIENCE & TECHNOLOGY(2024)
关键词
RF plasma,ion flux,plasma potential,DC-coupled plasma,notch-filter
AI 理解论文
溯源树
样例
生成溯源树,研究论文发展脉络
Chat Paper
正在生成论文摘要
PLASMA SOURCES SCIENCE & TECHNOLOGY(2024)