Microstructural Characterization of Inp Films on Soi (001) Substrates Grown by Selective Lateral Metal-Organic Vapor-Phase Epitaxy
Journal of Crystal Growth（2024）
关键词
A. 1. Characterization,A. 1. Defects,A. 1. Planar Defects,A. 3. Metalorganic Vapor phase epitaxy,A. 3. Selective epitaxy,B. 2. Semiconducting III-V materials
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