Low-Temperature Fabrication of Millimeter-Scale MEMS-Based Piezoelectric Ultrasonic Energy Harvesters for Medical Implants
Journal of Microelectromechanical Systems（2024）
Key words
Electrodes,Fabrication,Lead zirconate titanate,Performance evaluation,Silicon,Resonant frequency,Implants,Energy harvesting,piezoelectricity,ultrasonic transducer,medical implant
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