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Gas Sensitivity of PECVD Β-Ga 2 O 3 Films with Large Active Surface

A. V. Almaev,N. N. Yakovlev,E. V. Chernikov, N. N. Erzakova,L. A. Mochalov,M. A. Kudryashov, YuP. Kudryashova,S. N. Nesov

MATERIALS CHEMISTRY AND PHYSICS（2024）

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Key words
Gallium oxide,PECVD,Gas sensitivity
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