A Real-time Determination Method for Homodyne Grating Interferometer Signal Nonlinear Error Based on Duty Cycle Measurement of States
IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT（2024）
关键词
Accuracy,Fitting,Optical interferometry,Measurement uncertainty,Diffraction gratings,Phase shifting interferometry,Industries,Homodyne grating interferometer,nonlinear error,quadrature encoder signal
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