Within-Chip Bridged-Pattern Short Detection Using Spatially Distributed Kerf Test Structures in 7nm FinFET Technology

C. Y. Lin, A. Ogino, C. H. Lee, Y. S. Bang,B. W. Jeong, D. U. Choi, S. Wu, Y. Xin, B. Walsh, C. Manya,J. Sim,M. Angyal

2024 IEEE 33RD MICROELECTRONICS DESIGN & TEST SYMPOSIUM, MDTS 2024（2024）

引用 0|浏览1

暂无评分

关键词

Kerf Test Structure,Inline Scan Chain Latch,Within-chip Non-uniform Yield,Early Detection

AI 理解论文

溯源树

样例

生成溯源树，研究论文发展脉络

Chat Paper

正在生成论文摘要