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Comparison of Thermo-Optic Phase Shifters in Imec’s Silicon Photonics Platform

Yuxi Fang,Hong Deng, Xiangfeng Chen, Halil Cuma, K. P. Nagarjun,Filippo Ferraro, Guy Lepage, Peter De Heyn,Wim Bogaerts

25TH EUROPEAN CONFERENCE ON INTEGRATED OPTICS, ECIO 2024（2024）

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Key words
Silicon Platforms,Thermo-optic Phase Shifter,Undercut,Efficiency,Bandwidth
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