Design, Fabrication, Characterization, and Simulation of AlN-Based Piezoelectric Micromachined Ultrasonic Transducer for Sonar Imaging Applications
MICROMACHINES（2024）
关键词
AlN PMUT,receiving sensitivity,acoustic characteristics simulation model
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要