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Sputtering Deposition of Dense and Low-Resistive Amorphous In2O3: Sn Films under ZONE-T Conditions of Thornton's Structural Diagram

Yoshiharu Wada,Wafaa Magdy,Keigo Takeda,Yuta Mido,Naoto Yamashita,Takamasa Okumura,Kunihiro Kamataki,Kazunori Koga,Masaru Hori,Masaharu Shiratani,Naho Itagaki

APPLIED PHYSICS LETTERS（2024）

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