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Amorphous-to-crystalline Transition-Induced Two-Step Thin Film Growth of Quasi-One-dimensional Penta-Telluride ZrTe5

Journal of Material Science and Technology(2024)

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Abstract
Quasi-one-dimensional (quasi-1D) van der Waals (vdWs) materials, such as ZrTe5, exhibit unique electrical properties and quantum phenomena, making them attractive for advanced electronic applications. However, large-scale growth of ZrTe5 thin films presents challenges. We address this by employing sputtering, a common semiconductor industry technique. The as-deposited ZrTe5 film is amorphous, and post-annealing induces a crystallization process akin to transition-metal dichalcogenides. Our study investigates the electrical and optical properties during this amorphous-to-crystalline transition, revealing insights into the underlying mechanism. This work contributes to the fundamental understanding of quasi-1D materials and introduces a scalable fabrication method for ZrTe5 which offers the possibility of fabricating unique future electronic and optical devices.
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Key words
Quasi-one-dimensional,ZrTe 5,Large-scale,Thin film,Phase-change
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