Irradiation of Monocrystalline Silicon with a High-Power Pulsed Beam of Carbon Ions and Protons

S. V. Simakov,N.A. Vinogradova,O. N. Nikitushkina,S. B. Rumyantseva,A. B. Mikhailova,V. I. Tovtin,E. E. Starostin,M. V. Zhidkov,A. E. Ligachev,G. V. Potemkin,G. E. Remnev,S. K. Pavlov

INORGANIC MATERIALS-APPLIED RESEARCH（2024）

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high-power pulsed beam,silicon,crater,blistering

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