A Lamb Wave Resonator with Trapezoidal Interdigitated Electrodes

Xiang Chen,Yuanhang Qu,Tiancheng Luo,Xiyu Gu, Xiaoming Huang,Yao Cai,Shishang Guo,Yan Liu,Chengliang Sun

2024 IEEE MTT-S INTERNATIONAL CONFERENCE ON MICROWAVE ACOUSTICS & MECHANICS, IC-MAM（2024）

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关键词
Lamb wave resonator,aluminum nitride,spurious mode
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