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Fabrication of Lateral Diamond MOSFET with Buried Pn-Junctions by Diamond Surface Planarization Based on Carbon Solid Solution into Nickel

Tsubasa Kano,Kimiyoshi Ichikawa,Kan Hayashi,Taro Yoshikawa,Takao Inokuma,Satoshi Yamasaki,Norio Tokuda,Tsubasa Matsumoto

DIAMOND AND RELATED MATERIALS（2024）

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Key words
Diamond,Solid-solution reaction,Surface planarization,MOSFET fabrication
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