Impact of Thickness Dependent Ferroelectric and Interface Charge Variation on Device-to-Device Variation in Ferroelectric FET
CONFERENCE OF SCIENCE & TECHNOLOGY FOR INTEGRATED CIRCUITS, 2024 CSTIC（2024）
关键词
Impact Of Variables,Interfacial Charge,Ferroelectric Field-effect Transistor,Ferroelectric Charge,Thin Films,Monte Carlo Simulation,Charge Density,Gate Dielectric,Relative Dielectric Constant,Fluctuations In Parameters,Device Variation,Ferroelectric Films,Memory Window,Ferroelectric Layer
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