Evaluation of Lab-based Lithium Niobate Surface Acoustic Wave Test Structure Using Efficient Maskless Lithography and SMA Connection Approach for Microfluidic Applications
2024 IEEE 36TH INTERNATIONAL CONFERENCE ON MICROELECTRONIC TEST STRUCTURES, ICMTS 2024（2024）
关键词
Surface Acoustic Wave (SAW) devices,Lithium Niobate (LiNbO3),Sub-Miniature version A (SMA)
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