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Low Temperature Crystallization of Atomic-Layer-deposited SrTiO3 Films with an Extremely Low Equivalent Oxide Thickness of Sub-0.4 Nm

Hong Keun Chung,Jihoon Jeon,Han Kim,Myoungsu Jang,Sung-Chul Kim,Sung Ok Won,In-Hwan Baek,Yoon Jang Chung,Jeong Hwan Han,Sung Haeng Cho,Tae Joo Park,Seong Keun Kim

Applied Surface Science（2024）

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关键词
SrTiO3,DRAM capacitor,Atomic layer deposition,Equivalent oxide thickness
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