Design and Analysis of Flexible Tilt Mirror Driven by Piezoelectric Thin Sheet Actuators

Optical tilt mirrors (OTM) enable the mirrors to achieve high precision posture adjustment, playing a significant role in various optical system applications in the fields such as active optics, adaptive optics, satellite communications and biomedicines. However, the rapid development of modern technologies has brought new challenges to OTM in terms of their dimension, operating space and dynamic performance. Herein, a novel biaxial optical flexible tilt mirror (OFTM) driven by four simple bonded-type thin sheet piezoelectric actuators was proposed, where the OFTM was designed based on the flexible bending motions of composite piezoelectric beams. Particularly, OFTM is mainly composed of PZT sheet and stainless steel substrate, and shows a dimension of 42 mm x 42 mm x 0.2 mm. A theoretical model of OFTM was established to accurately describe the relationship between input electric field and output pose based on elastic beam theory, where the relationship was verified by both finite element analysis and experimental results. Finally, an OFTM prototype was fabricated and presented good performance on motion behaviors. Compared with traditional fast steering mirror (FSM) and MEMS mirror, the developed OFTM shows low cost, small size and simple manufacturing process, which greatly extends the applications of OFTTM in emerging fields.