Temperature-Compensated Pure Silicon Cantilever Resonator with Coupled Torsional Structure at Anchor

Combined with a coupled torsional structure at the anchor, a temperature compensated cantilever resonator was developed to reduce frequency dependence. The device shows the frequency dependence of 856 ppm with the temperature ranging from 25°C to 80°C. FEM simulation indicates that the coupled torsional structure at the anchor allows us to reduce temperature dependence of resonators to be 170 ppm with temperature ranging from −40°C to 80°C, optimizing wafer dopant, density, and mode.