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Near Zero-Power Environment Temperature Micromechanical Sensor-Switch Enabled by Sub-Micron Gap

2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)(2023)

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Abstract
In this work, we present a novel zero-power cantilever type temperature sensor-switch with a sub-micron (~700nm) contact gap. The sub-micron gap enables the device to switch on at just 10°C above room temperature for environmental temperature sensing. The device comprises a bimorph cantilever comprising Silicon (Si) and Aluminum (Al), with Titanium Nitride (TiN) switch contacts at the free end. We successfully demonstrate switch activation at 35°C, drawing an on-state power of <3μW while consuming near zero-power in the off-state. The device could be applied to monitor food storage temperatures where the sensor, as part of a wireless sensor node, is triggered when the room temperature goes above the warning level but draws nearly zero-power otherwise.
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Key words
Near zero-power sensors,MEMS switch,temperature sensors,bimorph,cantilever
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