2D Analysis of Sputtered Species Transport in High-Power Impulse Magnetron Sputtering (hipims) DischargeAnna Kapran,Charles Ballage,Zdenek Hubicka,Tiberiu MineaJOURNAL OF APPLIED PHYSICS(2024)引用 0|浏览17暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要