Benchmarking of X-Ray Fluorescence Microscopy with Ion Beam Implanted Samples Showing Detection Sensitivity of Hundreds of Atoms.

Mateus G. Masteghin, Toussaint Gervais,Steven K. Clowes,David C. Cox,Veronika Zelyk,Ajith Pattammattel,Yong S. Chu, Nikola Kolev,Taylor J. Z. Stock,Neil J. Curson,Paul G. Evans,Michael Stuckelberger,Benedict N. Murdin

SMALL METHODS（2024）

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关键词
gallium impurities,silicon-based quantum technology,single-atom detection,synchrotron X-ray fluorescence
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