A High-Performance piezoelectric micropump designed for precision delivery

A piezoelectric micropump (PE pump) was proposed featuring a multi-plate cantilever valve (MPCV) and a ramp channel (RC) to deliver high performance in a compact design. Both the MPCV and RC underwent thorough theoretical, simulation-based, and experimental evaluations. A specialized driver plate was then developed to precisely control the PE pump. Key parameters of the PE pump were optimized based on test results. The final phase involved assessing the PE pump ' s output performance through tests, including a simulated insulin infusion scenario. The findings revealed that the MPCV exhibited a pronounced rectification capability, significantly enhancing the pump ' s operational efficiency over traditional designs. The RC, on the other hand, effectively minimized fluid resistance, capitalizing on the fluid inertia effect for improved performance. Integrating the MPCV and RC aligned the fluid path from inlet to outlet closely parallel to the PE vibrator. This alignment reduced backflow, thereby improving the micropump ' s output efficiency. Operating at 240 voltage peak-to-peak (Vpp) and 230 Hz, the PE pump demonstrated a flow rate of 6.8 ml/min and an output pressure of 68.6 kPa while maintaining a compact size of merely 10 x 10 x 1.5 mm 3 . The precision in flow rate adjustment was refined to 0.15 mu l, with the deviation in insulin delivery being approximately +/- 3 %. The study presents a prototype for a continuous subcutaneous insulin infusion protocol, leveraging the PE pump ' s advanced features.