Modeling and Optimizing of Laser-Assisted Waterjet Process Parameters for Near-Damage-free Micromachining of Monocrystalline Silicon

Xuefei Liu,Chuanzhen Huang,Hanlian Liu,Dun Liu,Peng Yao,Bin Zou,Hongtao Zhu,Zhen Wang,Longhua Xu,Shuiquan Huang

PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART B-JOURNAL OF ENGINEERING MANUFACTURE（2024）

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Laser-assisted waterjet,nanosecond laser width,heat-affected zone (HAZ),lattice disorder,response surface methodology (RSM),depth-width ratio of V-groove

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