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Thickness and Mg Doping of Graded AlGaN Layers: Influence on Contact Layer's Structural and Electrical Properties for DUV Emitters

D. Majchrzak,L. M. Tran,M. Babij,J. Serafinczuk,W. Olszewski, R. Kuna,K. Opolczynska, A. Piejko,P. P. Michalowski,R. Kudrawiec,D. Hommel

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING（2024）

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关键词
Graded AlGaN alloys,Ultraviolet optoelectronics,MOVPE,Polarization doping
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