Fundamental Origin of Si Surface Defects Caused by Laser Irradiation and Prevention of Suboxide Formation Through High Density Ultrathin SiO2
Applied surface science（2024）
关键词
Laser irradiation,High density ultrathin SiO 2 layer,Surface properties,Interface properties,Suboxide
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要