High Figure-of-merit A1-mode Lamb Wave Resonators Operating Around 6 GHz Based on the LiNbO3 Thin Film

Xin Tong,Wenjuan Liu,Zhiwei Wen, Zesheng Liu,Qinwen Xu,Yang Zou,Chao Gao, Jie Zhou,Yan Liu,Yao Cai,Chengliang Sun

JOURNAL OF PHYSICS D-APPLIED PHYSICS（2024）

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lamb wave resonator,the first asymmetric mode,figure-of-merit,LN thin film

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