Time-resolved observation of 150 kHz band high power pulse burst high-frequency discharge using a high speed video camera and an ICCD camera

Abstract The discharge phase and time evolution of a 150 kHz high-power pulse burst discharge was observed. A vacuum chamber constructed by connecting glass tubes on which a solenoid coil was wound. Burst pulses with the width of 1000 μs and the repetition rate of 10 Hz was applied to the coil. A high-speed video camera and an ICCD camera were used to record the photographs of discharges. Observation of the discharge phase using a high-speed camera showed that the discharge occurs at the time of 40 µs and propagates from the wall of the cylindrical reactor. As time, the discharge pattern evolves, and a blanched pattern appears.The discharge blinks synchronizing with the instantaneous power, which suggests that the discharge is generated and maintained by the electrostatic field generated by the sides of the coil. The propagation velocity calculated from the downstream decreased with increasing pressure and increased with increasing power.