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Sapphire Surface Layer Structure and Transmission in Visible after Sputtering in H2–N2 RF Discharge

A. E. Gorodetsky,L. A. Snigirev,A. V. Markin,V. L. Bukhovets,T. V. Rybkina,R. Kh. Zalavutdinov,A. G. Razdobarin,E. E. Mukhin,A. M. Dmitriev

Technical Physics（2024）

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Key words
Leucosapphire,RF discharge,hydrogen,nitrogen,AFM,TEM,surface layer structure,visible transmission
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