Cavities Etched by Pulsed and Continuous Flow of XeF2 for Multispectral Infrared Sensors
TERAHERTZ, RF, MILLIMETER, AND SUBMILLIMETER-WAVE TECHNOLOGY AND APPLICATIONS XVII（2024）
关键词
Antennas,Infrared detectors,Infrared Imaging,Infrared Radiation,Nanoantennas,Silicon,Silicon Etching,Spherical Lenses
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