Demonstration of Recycling Process for GaN Substrates Using Laser Slicing Technique Towards Cost Reduction of GaN Vertical Power MOSFETs
Takashi Ishida, Takashi Ushijima, Shosuke Nakabayashi, Kozo Kato, Takayuki Koyama,Yoshitaka Nagasato,Junji Ohara,Shinichi Hoshi, Masatake Nagaya,Kazukuni Hara, Takashi Kanemura, Masato Taki,Toshiki Yui,Keisuke Hara,Daisuke Kawaguchi,Koji Kuno,Tetsuya Osajima,Jun Kojima,Tsutomu Uesugi,Atsushi Tanaka,Chiaki Sasaoka,Shoichi Onda,Jun Suda APPLIED PHYSICS EXPRESS（2024）
关键词
GaN substrate,recycling process,laser slicing,cost reduction,power device
AI 理解论文
溯源树
样例
