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Colloidal Etching of Deep Ultraviolet LED with Improved Light Extraction Efficiency

Zemin Zhang,Yiwei Cao,Ju Liu,Quanjiang Lv,Junlin Liu,Mohamed A. Habila,Shahid Hussain,Ling Bai

OPTICAL MATERIALS（2024）

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Key words
LED,Microlens,Light extraction efficiency,FDTD,Plasma etching
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