Influence of Forming Fe-Al Phase on Coercivity in Pr-Fe-B Thin Films on Glass Substrate

Pr-Fe-B thin films were fabricated on the AlN underlayer and glass substrates using the sputtering technique. Underlayers of various thicknesses in the range of 2 to 100 nm were inserted. The influence of the AlN underlayer on the orientation of thin films along the c-axis and the development of magnetic properties was systematically investigated. Grain sizes ranged from 40 to 100 nm, and the surface roughness measured between 1.77 nm and 4.44 nm. The obtained coercivities were in the range of 0.2-4.0 kOe. The thin film exhibited better magnetic properties at a 20 nm underlayer thickness. The formation of the Fe-Al (110) phase at the Pr-Fe-B/AlN interface supported the growth of Pr-Fe-B thin films.