Microwave Hydrogen Plasma Etching on the Laser-Cut Surface of Single Crystal Diamond: Phases, Etching Morphology, Stress Evolution and the Effect of Etching on the Subsequent Homoepitaxial Growth
DIAMOND AND RELATED MATERIALS（2024）
关键词
Single -crystal diamond,Hydrogen plasma etching,Laser -cut surface,Etching morphology,Homoepitaxial growth
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