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Twenty-nine Million Intrinsic Q-factor Monolithic Microresonators on Thin Film Lithium Niobate

Xinrui Zhu,Yaowen Hu, Shengyuan Lu,Hana K. Warner, Xudong Li,Yunxiang Song,Leticia Magalhaes,Amirhassan Shams-Ansari,Andrea Cordaro,Neil Sinclair,Marko Loncar

PHOTONICS RESEARCH（2024）

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Key words
Thin Film Resonators,Microresonators,Aluminum Nitride Thin Films,Integrated Photonics
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