Low-pressure Inductively Coupled Plasmas in Hydrogen: Impact of Gas Heating on the Spatial Distribution of Atomic Hydrogen and Vibrationally Excited States
PLASMA SOURCES SCIENCE & TECHNOLOGY（2024）
Key words
low pressure,hydrogen,vibrational states,gas temperature,inductively coupled
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined