Room Temperature Nanophononics from 1 GHz – 110 GHz with Composite Piezoelectric Transducer HBARs
2024 IEEE 37TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS（2024）
关键词
High overtone bulk acoustic resonators,acoustic phonons,epitaxial thin films,piezoelectric transducers,scandium aluminum nitride,phonon spectroscopy
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