Enhancement of Hardness and Corrosion Resistance of Al-Si-N Multilayer Color Coating Via SiN/AlSiN/AlN Compositional Gradient Interlayer

Xunwang Shi,Sam Zhang, Jingchuan Li,Yuhang You,Xiuhan Yu,Deen Sun, Yongbo Shao,Hui Du, Dawen Wang, Ming Zhao,Min Zhu,Fengji Li

Journal of vacuum science & technology A Vacuum, surfaces, and films（2023）

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