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Electrostatically Actuated All Metal MEMS Pirani Gauge with Tunable Dynamic Range

Manu Garg,Dhairya Singh Arya,Sushil Kumar,Khanjan Joshi,Mujeeb Yousuf,Yi Chiu,Pushpapraj Singh

JOURNAL OF MICROMECHANICS AND MICROENGINEERING（2024）

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Key words
hermeticity,Joule heating,microelectromechanical systems (MEMS),Pirani gauge,tunable gap,vacuum packaging
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